On changing the properties of a multilayer structure by preliminary processing of a substrate
| creativeworkseries.issn | 2720-4081 | |
| dc.contributor.author | Pankratov, Evgenij Leonidovič | |
| dc.date.available | 2025-03-28T09:45:12Z | |
| dc.date.issued | 2022 | |
| dc.description | Bibliogr. s. 99-[100]. | |
| dc.description.abstract | In this paper, the effect of the preliminary processing of a substrate on the properties of a grown heterostructure is investigated. It is shown that the growth of an epitaxial layer on a buffer layer after preliminary annealing (before the growth) makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure accounting for mismatch-induced stress. | en |
| dc.description.placeOfPublication | Kraków | |
| dc.description.version | wersja wydawnicza | |
| dc.identifier.doi | https://doi.org/10.7494/cmms.2022.2.0790 | |
| dc.identifier.eissn | 2720-3948 | |
| dc.identifier.issn | 2720-4081 | |
| dc.identifier.uri | https://repo.agh.edu.pl/handle/AGH/111725 | |
| dc.language.iso | eng | |
| dc.publisher | Wydawnictwa AGH | |
| dc.relation.ispartof | Computer Methods in Materials Science | |
| dc.rights | Attribution 4.0 International | |
| dc.rights.access | otwarty dostęp | |
| dc.rights.uri | https://creativecommons.org/licenses/by/4.0/legalcode | |
| dc.subject | gas phase epitaxy | en |
| dc.subject | improvement of properties of films | en |
| dc.subject | analytical approach for modeling | en |
| dc.title | On changing the properties of a multilayer structure by preliminary processing of a substrate | en |
| dc.title.related | Computer Methods in Materials Science | en |
| dc.type | artykuł | |
| dspace.entity.type | Publication | |
| publicationissue.issueNumber | No. 2 | |
| publicationissue.pagination | pp. 89-99, [1] | |
| publicationvolume.volumeNumber | Vol. 22 | |
| relation.isJournalIssueOfPublication | 757f896b-547f-4e2d-917a-0e5000cb1aa5 | |
| relation.isJournalIssueOfPublication.latestForDiscovery | 757f896b-547f-4e2d-917a-0e5000cb1aa5 | |
| relation.isJournalOfPublication | 1f717eff-e164-4db5-8437-ca75e714cac5 |
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