On the approach to the analysis of the growth of epitaxial layers by pulsed laser deposition

Abstract

This paper considers an analytical approach for the prognosis of mass and heat transport during the growth of epitaxial layers by means of pulsed laser deposition. The approach provides the opportunity to make a prognosis which takes into account the spatial and temporal variations of their parameters and, at the same time, the nonlinearity of these processes. Based on this approach, the influence of the variation of several parameters on the growth process is investigated.